Electron beam processed polymers with multi-properties
نویسندگان
چکیده
منابع مشابه
Study on polymers with implementation in electron beam lithography
In this chapter, we present a study on three polymer resists that are important for electron beam lithography (EBL) and we demonstrate their successful application for nano-structuring and EBL process optimization. The experiments performed showed that the resists behavior, including their sensitivity and contrast, is influenced by the energy of the electrons, by the nature of the resists and u...
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ژورنال
عنوان ژورنال: Journal of Advanced Science
سال: 2005
ISSN: 0915-5651,1881-3917
DOI: 10.2978/jsas.17.28